ION ETCHING METHOD,申请号JP19780126115-传众专利搜索

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发明名称	ION ETCHING METHOD
摘要
申请公布号	JPS5553420(A)	申请公布日期	1980.04.18
申请号	JP19780126115	申请日期	1978.10.16
申请人	NIPPON TELEGRAPH & TELEPHONE	发明人	TOSHIMA TOMOYUKI;YANAGISAWA KEIICHI;KAMEYAMA TADAHIKO
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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