| 摘要 |
PURPOSE:To make it possible to stably perform analysis in a depth direction for a long time, by correcting the energy distribution of a secondary ion on the basis of the potential of a specimen so that the secondary ion with the same energy always passes through an electric field. CONSTITUTION:The primary ion 2 generated from an ion source 1 is allowed to irradiate a specimen 4 and the secondary ion discharged by the specimen 4 is separated in a mass/charge ratio by a mass analyser 5 to be detected by a detector 6. The secondary ion signal passed through a gate 7 is measured by a counter 8 and a peak judging circuit 19 detects the peak position of the energy distribution of the secondary ion on the basis of the output from the counter 8 to set secondary ion acceleration voltage to the peak position through a secondary ion acceleration voltage control circuit 17. A scanning control circuit 11 starts an acceleration scanning circuit 20 at the time of a predetermined scanning frame and input the scanning frame to an accelerator 21 to scan the potential of a specimen. |
