| 摘要 |
<p>PURPOSE:To stop an air cylinder and prevent a surface table from accidentally dropping suddenly by arranging an open/close valve to be closed when a pressure sensor arranged in an air line on an outgoing side is actuated when an air leakage occurs at the time of the air cylinder coming down. CONSTITUTION:When a pressure sensor 18 under a sequencer control is actuated by a pressure drop in an air line 15 due to an air leakage, an open/close valve 19 closes to close the air linc 15. As a result, a pressure drop after the air leakage on an outgoing side 13 when an air cylinder 10 comes down is stopped. An upper surface table 1 connected to a rod 11 of the cylinder 10 can be prevented from accidentally dropping suddenly onto a lower surface table 2.</p> |
