MONITOR PATTERN FOR CONTACT HOLE FORMATION PROCESS,申请号JP19880087613-传众专利搜索

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发明名称	MONITOR PATTERN FOR CONTACT HOLE FORMATION PROCESS
摘要
申请公布号	JPH01259544(A)	申请公布日期	1989.10.17
申请号	JP19880087613	申请日期	1988.04.08
申请人	FUJITSU LTD	发明人	WATANABE YOSHIHARU
分类号	H01L21/3205;H01L21/66;H01L23/52	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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