| 摘要 |
PURPOSE:To easily and efficiently form fine particles with a desired particle size, by generating the heat exciting reaction of a stock material not reacting at ambient temp. by dielectric breakdown plasma generated by condensing laser beam. CONSTITUTION:CO2-TEA laser beam from a laser oscillator 6 is one with about 0.5-1J/pulse class, a pulse lasting time of about 1 mus and peak output of about 1MW and condensed by a lens 7 to generate ionization action due to an ultra- high electromagnetic field in the vicinity of the focus of said lens and laser induced dielectric breakdown plasma is generated in a tubular passage 3. If stock gases A, B, for example, SuCl4 gas and O2 gas mixed in a stock material container 1 are guided to the side of a product container 2 through the passage 3, the gaseous mixture generates heat exciting reaction by rapid heating due to LIDB plasma P in the tubular passage 3 to form fine particles which are, in turn, transferred to the container 2 while the shapes thereof are held by quenching due to heat extinction. |
