| 摘要 |
PURPOSE: To provide a device for ultrasonically inspecting an object to be inspected, by which inspection can be performed over a wide range without modifying an array probe, a pulsar, an amplifier, etc. CONSTITUTION: In an array probe 5, piezoelectric elements are aligned in X- direction, and ultrasonic beams emitted from the elements are used for scanning (electronic scan) in X-direction. The array probe 5(A) in position A is mechanically and continuously moved in Y-direction to perform electronic scan at every predetermined pitch (p) during the movement, and when at position B the array probe 5 is moved in X-direction by the sum of its scanning range L and the pitch (p), and then moved in Y-direction by ΔY to perform similar scan from position C to position D. The scanning range in X-direction can be enlarged, and sampling can be performed while matching sampling points (P10 and P20 ) at the ends of the electronic scan are made to coincide with each other. |
