发明名称 Single-crystal wafer having a superconductive ceramic thin film formed thereon.
摘要 A superconductive ceramic thin film-formed single-crystal wafer comprising a single-crystal wafer, an intermediate ceramic thin film formed on a surface of the single-crystal wafer, and a superconductive ceramic thin film formed on the intermediate ceramic thin film. The intermediate ceramic thin film comprises, as a main phase, a crystalline phase having a composition by atomic ratio of Bi2Sr2CaxOy (provided that x: 1 to 2; and y: 6 to 7), and the superconductive ceramic thin film comprises, as a main phase, a crystalline phase having a composition by atomic ratio selected from the group consisting of Bi2Sr2Ca1Cu2O8 and Bi2Sr2Ca2Cu3O10. Alternatively, the intermediate ceramic thin film comprises, as a main phase, a crystalline phase having a composition by atomic ratio selected from the group consisting of Tl1Ba2CasOt (provided that s: 1 to 2; and t: 4.5 to 5.5) and Tl2Ba2CavOw (provided that v: 1 to 3; and w: 6 to 8), and the superconductive ceramic thin film comprises, as a main phase, a crystalline phase having a composition by atomic ratio selected from the group consisting of Tl2Ba2Ca1Cu2O8, Tl2Ba2Ca2Cu3O10, Tl1Ba2Ca1Cu2O7, Tl1Ba2Ca2Cu3O9, and Tl1Ba2Ca3Cu4O11.
申请公布号 EP0412199(A1) 申请公布日期 1991.02.13
申请号 EP19890114897 申请日期 1989.08.11
申请人 MITSUBISHI METAL CORPORATION 发明人 SUGIHARA, TADASHI C/O CHUO KENKYUSHO, MITSUBISHI;TAKESHITA, TAKUO C/O CHUO KENKYUSHO, MITSUBISHI
分类号 C30B29/22;C04B35/45;C23C14/08;C30B23/02;H01B12/06;H01L39/02;H01L39/24 主分类号 C30B29/22
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