| 摘要 |
PURPOSE: To provide a package made of sintered aluminum-nitride with good mechanical strength, by preventing a crystal grain from enlarging without decreasing good thermal conductivity in sintered material. CONSTITUTION: A package is made of sintered aluminum-nitride material containing at least one of Ca, Sr or Ba oxide materials of 1 to 10wt.%, and silicon of 0.01 to 0.2wt.%. In addition to this way, only a surface layer of the package may be made of sintered aluminum-nitride material containing silicon. The inner layer contains at least one of Ca, Sr or Ba oxide materials of 1 to 10wt.%, and substantially no silicon material. |
