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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03159119(A)
申请公布日期
1991.07.09
申请号
JP19890297357
申请日期
1989.11.17
申请人
HITACHI LTD
发明人
ANDO HIDEMI;MOCHIZUKI YASUHIRO
分类号
H01L21/265;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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