| 摘要 |
PURPOSE:To obtain an ultrasonic spectrum microscope capable of executing ultrasonic scanning for a body to be inspected, without being accompanied by mechanical scanning. CONSTITUTION:An ultrasonic sensor 1 is a transmission-reception independence type sensor constructed of an array type planar transducer 12 and a cylindrical transducer 14. An input signal to be impressed on each piezoelectric element 24 of a piezoelectric element group 22 of the planar transducer 12 from a pulser 38 is given a time difference by an input signal processing circuit 34a. Thereby a lag is made to occur in the time of generation of an ultrasonic wave by each piezoelectric element 24. By setting this time lag appropriately, the ultrasonic wave propagated from the planar transducer 12 is focused linearly on a focusing line 20c intersecting a linear scanning line 20b on the surface 20a of a body to be inspected. A reflected wave from the point of intersection of these two lines 20b and 20c is received by the cylindrical transducer 14, converted into an electric signal and subjected to a spectrum analysis in FFT 54. |
