发明名称 DEPTH-ANALYSIS METHOD USING LIGHT ACOUSTIC SPECTRAL METHOD AND FOURIER SPECTRAL METHOD
摘要 PURPOSE:To obtain a thermal distribution information of a specific depth of a sample which depends on the number of irradiation light waves by taking out a frequency component within a specified range of a signal which is sampled and then applying a specified signal to it or performing its Fourier transformation. CONSTITUTION:When a modulation frequency f of each time resolution signal of a rapid scan interferometer 2 is only within a specified range, namely within a range which is smaller than half the repetition frequency of a pulse light source 1, a low-frequency component of that signal at a specified range is taken out by a low-pass filter 10, is amplified by a main amplifier 11, is sampled by a reference signal with a period which the interferometer 2 has by an AD converter 12, and is subjected to Fourier transformation by a computer 13, thus obtaining a pulse response function A of a light acoustic spectral method PAS indicating a thermal distribution information in depth direction for a light with the number of waves of a sample 4. On the other hand, when a frequency is outside a specified range, a signal where a component at a specified range is taken out is sampled and then phase compensation and conversion of the number of waves are performed by the computer 13, thus obtaining the PAS function A.
申请公布号 JPH0510870(A) 申请公布日期 1993.01.19
申请号 JP19910165655 申请日期 1991.07.05
申请人 JEOL LTD 发明人 MASUTANI KOJI
分类号 G01J3/45;G01N21/00;G01N29/00 主分类号 G01J3/45
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