| 摘要 |
PURPOSE: To provide a small motion converter wherein a part of a semiconductor substrate that is elastically supported is formed while being separated. CONSTITUTION: The motion converter is manufactured of a semiconductor material by etching, and comprises elements 16 and 20 supported elastically. With them, an electric detection signal or a torque signal corresponding to vibration sensitivity is generated, thus a converter related with various physical parameters is configured. As for a gyroscopic converter, a weight 28 is provided on both sides while being balanced. The elements 16 and 22 and electrodes 30, 32, 38 and 40 are separated by pn joint or a dielectric body. 20 and 24 constitute a support connection part. Selection of crystal orientation is important since an element is formed by etching. Conversion of mechanical/electric signal is configured of the pn joint and a control action at a deflection part. |
