FORMATION OF THIN NITRIDE FILM,申请号JP19920070951-传众专利搜索

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发明名称	FORMATION OF THIN NITRIDE FILM
摘要
申请公布号	JPH05271945(A)	申请公布日期	1993.10.19
申请号	JP19920070951	申请日期	1992.03.27
申请人		发明人
分类号	C23C16/34;C04B41/50;C23C16/48;(IPC1-7):C23C16/34	主分类号	C23C16/34
代理机构		代理人
主权项
地址

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