发明名称 SEMICONDUCTOR RADIATION DETECTING ELEMENT, GAMMA-RAY NEUTRON BEAM DETECTOR AND DOSIMETER
摘要 PURPOSE:To realize a dosimeter, e.g. an exposure dosimeter, using a single detector without mounting a plurality of detectors for gamma-ray and neutron beam by setting the thickness of a semiconductor substrate greater than the width of depletion layer at a maximum reverse bias voltage. CONSTITUTION:An Al electrode 2a is provided on one surface of a P type silicon semiconductor crystal 1 and an Al electrode 2b is provided on the other surface through a baron intrusion layer 4 to form a surface barrier type detection element having diode structure. A nuclear reaction tank 5 for <10>B or <6>Li, which causes nuclear reaction with neutrons to radiate heavily charged particles, e.g. alpha-ray, is formed immediately above the Al electrode 2a on the barrier side of detection element thus forming a neutron gamma-ray detection element having sensitivity of neutron. The thickness of the diode crystal 1 in the semiconductor radiation detecting element is set greater than the width of the depletion layer 3 at a maximum verse bias voltage.
申请公布号 JPH07131052(A) 申请公布日期 1995.05.19
申请号 JP19930276302 申请日期 1993.11.05
申请人 FUJI ELECTRIC CO LTD 发明人 YAMANO TOSHIYA
分类号 G01T1/24;G01T3/08;H01L31/09;(IPC1-7):H01L31/09 主分类号 G01T1/24
代理机构 代理人
主权项
地址