发明名称 |
Unitary micro-flexure structure and method of making same |
摘要 |
A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable surface-boundary-defining structure.
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申请公布号 |
US5476131(A) |
申请公布日期 |
1995.12.19 |
申请号 |
US19920989170 |
申请日期 |
1992.12.10 |
申请人 |
CENSTOR CORPORATION |
发明人 |
HAMILTON, HAROLD J.;MARTIN, TIMOTHY W. |
分类号 |
G11B5/105;(IPC1-7):G11B5/105 |
主分类号 |
G11B5/105 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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