| 摘要 |
PURPOSE:To prevent a sun gear raising and lowering mechanism in a plane polishing device from being interfered in sun gear raising and lowering operation due to sticking of abrasive. CONSTITUTION:A holding member 11 to hold a sun gear 4 is installed on a sun gear driving shaft 4a so as to be movable freely only in the axis direction by regulating the movement of the rotating direction. A propelling member 15 is screw-fitted to the sun gear driving shaft 4a, and the holding member 11 is made movable vertically by the rotation, and a fixing member 19 is installed to fix the propelling member 15 to the sun gear driving shaft 4a, and the propelling member 15 and the fixing member 19 are arranged in a position covered with an upper surface plate driving driver 8 arranged on the upper end of an upper surface plate driving shaft 1a, so that these are protected from abrasive. |
