Component contact bonding reducing thermal stress on components during bonding
摘要
The appts. to bring wires of components and component groups into contact has an energy supply (5) additionally over the appts. to apply thermocompression or thermosonic bonding. At least one tilting mirror (2) is at the beam path from the energy supply (5) to deflect the beam (1) to contact path (3) of the component or component group. The energy supply (5) is a semiconductor laser module.
申请公布号
DE4437484(A1)
申请公布日期
1996.04.25
申请号
DE19944437484
申请日期
1994.10.20
申请人
CMS MIKROSYSTEME GMBH CHEMNITZ, 09577 NIEDERWIESA, DE