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发明名称
THERMAL STABILIZING METHOD OF CONTACT BARRIER OF GAAS SEMICONDUCTOR AND RUTHENIUM OXIDE
摘要
申请公布号
KR0162863(B1)
申请公布日期
1999.02.01
申请号
KR19940033313
申请日期
1994.12.08
申请人
KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
MIN, SUK-KI;KIM, EUN-KYU;PARK, YONG-JOO
分类号
H01L21/203;(IPC1-7):H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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