THIN-LAYERED PIEZO-RESONATOR

摘要

Preferably, the resonator is provided with lithographically produced holes or similar structures in the top electrode layer. The average distance between said holes or structures is shorter than the wavelength provided in order to operate each component. Said structures are preferably distributed in both an even manner to enable uniform modification of layer mass for each surface and specific adjustment of the resonance frequency or frequencies, and in an uneven manner in order to avoid the effects of diffraction.