| 摘要 |
PROBLEM TO BE SOLVED: To work an optical connection end surface on an optical waveguide element formed on a hardly workable base for a short time by forming a reflection film on the whole surface of the base, and applying high energy to a zone exposed by removing the reflection film to form the grooves. SOLUTION: A zone of high refractive index is formed on a surface of a lithium niobate crystalline base 1, and an optical waveguide 2 is formed. Then a reflection film 3 is formed on the whole surface of the base 1 comprising the optical waveguide 2. After the formation of the reflection film 3, high energy is applied by a high energy source 6 to groove the surface of the base 1. Only the surface zone 5 not coated with the reflection film 3 is grooved by the irradiation of high energy. The base surface not coated with the reflection film 3 has the heat conductivity higher than the surface zone 5, so that the base 1 is hardly damaged by heat. Similarly the heat is hardly conducted on a connection end surface 4 of the optical waveguide and an optical fiber, so that the waveguide structure is not changed and the loss in the optical coupling is small. Whereby the optically coupled end surface of low loss can be formed for a short time. |
