Microgyroscope with two resonant plates

摘要

A microgyroscope with two resonant plates is provided. The microgyroscope includes a substrate (1); first and second frames (11, 12) provided on the substrate to have a predetermined height, the first and second frames facing each other; a plurality of anchors (3) supporting the first and second frames with respect to the substrate; first and second resonant plates (21, 22) provided between the first and second frames (11, 12) to be separated from each other by a predetermined distance; and a matching link unit (40) connected to the first and second resonant plates so that it links the motion of one resonant plate to the motion of the other resonant plate such that the matching link unit is moved by the motion of one resonant plate in a first direction and then moves the other resonant plate in a second direction opposite to the first direction. In the microgyroscope, the difference between the resonance frequencies of the two resonant plates (21, 22) is removed by a self resonant matching structure implemented by the matching link, so that the range of an allowable process error is large, and the microgyroscope can be easily manufactured. Additionally, the reliability and the linearity of a resonance structure are improved. Since the driving beam (33) and the sensing beam (7) are separately designed, mode coupling can be prevented, thereby increasing the sensing sensibility. <IMAGE>