| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for feeding a coating liquid capable of performing stable feeding of a coating liquid. SOLUTION: The apparatus 1 for feeding a coating liquid has a liquid A tank 3 for storing liquid A 7; and a liquid B tank 5 for storing liquid B 9 and the liquid A tank 3 and the liquid B tank 5 are connected to a mixer 10. The mixer 10 is connected to an intermediate tank 17 and the intermediate tank 17 has a tank 20. A deaerator 35 is connected to the intermediate tank 17 and a primary filter 39 is connected to the deaerator 35. Cooling pipes 3a, 5a, 10a, 19a, 35a, 39a are helically wound on the liquid A tank 3, the liquid B tank 5, the mixer 10, the tank 20, the deaerator 35 and the primary filter 39, and the coating liquid 19a is cooled by these. COPYRIGHT: (C)2007,JPO&INPIT
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