Spin bowl compatible polyamic acids/imides as wet developable polymer binders for anti-reflective coatings

摘要

Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment the polymers of the composition include recurring monomers having the formulas where: (1) each R is individually selected from the group consisting of hydrogen, -OH, aliphatics, and phenyls; and (2) L is selected from the group consisting of -SO₂- and -CR'₂-, where each R' is individually selected from the group consisting of hydrogen, aliphatics, phenyls, and -CX₃, where each X is individually selected from the group consisting of the halogens. The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.