| 摘要 |
An x-ray mask blank and an x-ray mask wherein, assuming that Ra<SUB>max </SUB>and Ra<SUB>min </SUB>are defined as a maximum value of Ra and a minimum value of Ra of a surface roughness (Ra: center-line average roughness) on a plurality of points within a predetermined area on an x-ray membrane 12, respectively, the surface of the x-ray membrane 12 has a surface condition so that it may satisfy an expression: (Ra<SUB>max</SUB>-Ra<SUB>min</SUB>)/(Ra<SUB>max</SUB>+Ra<SUB>min</SUB>)<=0.15.
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