发明名称 |
Micro-electromechanical system (MEMS) based current and magnetic field sensor |
摘要 |
A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.
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申请公布号 |
US2007200549(A1) |
申请公布日期 |
2007.08.30 |
申请号 |
US20060356332 |
申请日期 |
2006.02.16 |
申请人 |
BERKCAN ERTUGRUL;CHANDRASEKARAN SHANKAR |
发明人 |
BERKCAN ERTUGRUL;CHANDRASEKARAN SHANKAR |
分类号 |
G01R15/18 |
主分类号 |
G01R15/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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