| 摘要 |
In an anti-reflective film including alternating layers of high refractive-index layers and low refractive-index layers, by designing such that a designed central wavelength lambda<SUB>0 </SUB>is within a wavelength range of 141 nm to 189 nm, and that when the first to eighth layers as counted from a substrate have optical film thicknesses d 1 to d 8 respectively, the equations of: <?in-line-formulae description="In-line Formulae" end="lead"?>0.45lambda<SUB>0</SUB><=d 1 <=0.65lambda<SUB>0</SUB>;<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.05lambda<SUB>0</SUB><=d 2 <=0.20lambda<SUB>0</SUB>;<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.29lambda<SUB>0</SUB><=d 3 <=0.49lambda<SUB>0</SUB>;<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.01lambda<SUB>0</SUB><=d 4 <=0.15lambda<SUB>0</SUB>;<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.05lambda<SUB>0</SUB><=d 5 <=0.20lambda<SUB>0</SUB>;<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.23lambda<SUB>0</SUB><=d 6 <=0.28lambda<SUB>0</SUB>;<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.23lambda<SUB>0</SUB><=d 7 <=0.28lambda<SUB>0</SUB>; and<?in-line-formulae description="In-line Formulae" end="tail"?> <?in-line-formulae description="In-line Formulae" end="lead"?>0.23lambda<SUB>0</SUB><=d 8 <=0.28lambda<SUB>0</SUB><?in-line-formulae description="In-line Formulae" end="tail"?> are satisfied, the anti-reflective film can be formed so as to have a low reflectance for a light incident at such a large angle as 30 degrees or more, without increasing the whole thickness of the film.
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