| 摘要 |
A light source unit ( 100 A) for alignment is provided with a camera ( 30 ), a lighting apparatus ( 102 ), and furthermore, a changing section ( 110 ), an image processing section ( 112 ), an extracting section ( 114 ) and a setting section ( 116 ). The changing section ( 110 ) controls drive of a shifting mechanism ( 118 ) based on information from the setting section ( 116 ), and the lighting apparatus ( 102 ) is shifted to a desired position. The image processing section ( 112 ) acquires a quantitative data relating to an alignment mark ( 50 ) and contrast of its peripheral part ( 104 ), based on image pickup information from the camera ( 30 ). The extracting section ( 114 ) extracts an interval wherein the contrast is optimized as an optimum interval, based on the quantitative data. The setting section ( 116 ) gives information to the changing section ( 110 ) so that the interval between the lighting apparatus ( 102 ) and the alignment mark ( 50 ) is the optimum interval.
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