PLASMA TREATMENT EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide plasma treatment equipment having a function for removing a deposit adhering on the outer peripheral section of the rear of a body to be treated, having a high throughput and reducing a device cost. SOLUTION: A deposit removing unit in a system removing the deposit on the outer periphery of the rear of the body to be treated by a pulse laser irradiation is connected to an atmospheric-air side carrying chamber for the plasma treatment equipment. COPYRIGHT: (C)2008,JPO&INPIT