发明名称 |
PARTIAL COHERENCE INTERFEROMETER WITH MEASUREMENT AMBIGUITY RESOLUTION |
摘要 |
A partial coherence interferometer incorporates a focusing system for resolving measurement ambiguities. A focus-sensing beam is directed through a common objective with the measurement beam of the interferometer for conveying the beams to and from a test surface. An unambiguous measuring range is equated to a predetermined range of focusing errors.
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申请公布号 |
US2009153839(A1) |
申请公布日期 |
2009.06.18 |
申请号 |
US20070958411 |
申请日期 |
2007.12.18 |
申请人 |
QUALITY VISION INTERNATIONAL, INC. |
发明人 |
KAY DAVID B. |
分类号 |
G01J3/00;G01B9/02;G01J3/28 |
主分类号 |
G01J3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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