High sheet resistor in CMOS flow

摘要

An integrated circuit containing CMOS gates and a counterdoped polysilicon gate material resistor which has a body region that is implanted concurrently with the NSD layers of the NMOS transistors of the CMOS gates and concurrently with the PSD layers of the PMOS transistors of the CMOS gates, and has a resistor silicide block layer over the body region which is formed of separate material from the sidewall spacers on the CMOS gates. A process of forming an integrated circuit containing CMOS gates and a counterdoped polysilicon gate material resistor which implants the body region of the resistor concurrently with the NSD layers of the NMOS transistors of the CMOS gates and concurrently with the PSD layers of the PMOS transistors of the CMOS gates, and forms a resistor silicide block layer over the body region of separate material from the sidewall spacers on the CMOS gates.

主权项

1. An integrated circuit, comprising:
a substrate; an n-channel metal oxide semiconductor (NMOS) transistor located in and on said substrate, said NMOS transistor including:
an NMOS gate located on an NMOS gate dielectric layer on said substrate, said NMOS gate including polysilicon; andn-type n-channel source/drain (NSD) layers in said substrate adjacent to said NMOS gate, said NSD layers containing n-type dopants; a p-channel metal oxide semiconductor (PMOS) transistor located in and on said substrate, said PMOS transistor including:
a PMOS gate located on a PMOS gate dielectric layer on said substrate, said PMOS gate including polysilicon; andp-type p-channel source/drain (PSD) layers in said substrate adjacent to said PMOS gate, said PSD layers containing p-type dopants; a counterdoped polysilicon gate material resistor located over said substrate; said counterdoped polysilicon gate material resistor including:
a resistor layer, said resistor layer including polysilicon, said resistor layer having a body region containing n-type dopants as located in said NSD layers and p-type dopants as located in said PSD layers, and said resistor layer having head regions at each end of said body region, said head regions having a same conductivity type as said body region; andsilicide layers on said head regions, said NSD layers and said PSD layers; and a pre-metal dielectric (PMD) layer located over said silicide layers.