| 摘要 |
PURPOSE:To reduce the consumption of an expensive gas with a gas recovering and circulating device at the time of working a material with a working device using radial reaction by recovering and recycling a reactive gas in the gas discharged from the working device and a carrier gas. CONSTITUTION:The reactional product in a gas discharged from a working device 11 is separated and removed by an adsorption tank 17 in a gas recovering and circulating device 12, water is removed by a dehydration tank 18, and oxygen is removed in a deoxygenation tank 19, and the suspended fine particle is removed by a filter 21. Consequently, a recovered gas consisting of only the unreacted gas and carrier gas is sent to a feed tank 15 having a gas sucking and boosting source 20, the deficiency of the reactive gas and carrier gas is supplied to adjust the reactive gas to a specified concn., and the gas is introduced into the working device 11. |
