发明名称 SAMPLE TRANSFER MECHANISM AND VACUUM DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a sample transfer mechanism which enables easy storage operation of a sample transfer rod in a small space.SOLUTION: A sample transfer mechanism 10 includes: a sample transfer rod 11 which transfers a sample along a horizontal direction in a sample chamber and a reserved sample chamber 4a; a support medium 21 supporting the sample transfer rod 11; a case 31 which supports the support medium 21 so that the support medium 21 may rotate around a rotation axis P perpendicular to the horizontal direction; and a third O ring 36 disposed between the support medium 21 and the case 31 and configured to seal the sample chamber and the reserved sample chamber 4a. The sample transfer rod 11 may move between a use state where the sample transfer rod 11 may transfer the sample and a storage state where the sample transfer rod 11 is moved from the use state to a position along a vertical direction by rotation of the support medium 21.SELECTED DRAWING: Figure 3
申请公布号 JP2016143528(A) 申请公布日期 2016.08.08
申请号 JP20150017440 申请日期 2015.01.30
申请人 HITACHI HIGH-TECH SCIENCE CORP 发明人 KADA MASAKATSU;IWAHORI TOSHIYUKI
分类号 H01J49/16;H01J49/40 主分类号 H01J49/16
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