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发明名称
METHOD FOR FORMING INTERCONNECT STRUCTURE, INSULATING FILMS AND SURFACE PROTECTIVE FILMS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR960006961(B1)
申请公布日期
1996.05.25
申请号
KR19920016642
申请日期
1992.09.09
申请人
NIPPON ELECTRIC K.K.
发明人
HOMA, TETSUYA
分类号
H01L21/768;(IPC1-7):H01L21/316
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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