摘要 |
PURPOSE: To provide an electronic component vacuum clamping device wherein various electronic components can be stably clamped, and at the same time, a nozzle does not exert an effect on the image of an electronic component clamped. CONSTITUTION: A nozzle 4 consists of a tapered part 41 and a reflective plate 42 and evacuation inner tubes 43 and 44 are perforated in the interior of the nozzle 4. The inner tube 44 is connected with an evacuating device (is not shown in the diagram) via an evacuation inner tube (is not shown in the diagram) penetrating the interior of a rotary mounting mechanism 5. The tapered part 41 is mirror-finished. The reflective plate 42 is formed of a white resin or the like and reflects irregularly illuminating light from the lower part of the nozzle 4. |