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发明名称
METHOD OF INHIBITING HILLOCK FORMATION IN FILMS AND FILM THEREBY AND MULTILAYER STRUCTURE THEREWITH
摘要
申请公布号
CA906678(A)
申请公布日期
1972.08.01
申请号
CAD906678
申请日期
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
FRANCOIS M. D'HEURLE;PRAVEEN CHAUDHARI;AMITAVA GANGULEE
分类号
主分类号
代理机构
代理人
主权项
地址
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