| 摘要 |
PURPOSE:To prepare a hydrogen permselective composite membrane having high hydrogen permselectively and permeability and excellent in heat resistance and chemical resistance, by applying plasma polymerization to an organosilance compound. CONSTITUTION:A plasma polymerization membrane is accumulated to the surface of a polymer support by using ehtynyltrimethylsilane to form a composite membrane. When the polymer support has an average pore size of 0.1mum or less or is not porous, the plasma polymerization membrane is accumulated to the surface of said support and, when 0.1mum or more, the accumulation of said membrane is performed to close surface pores. The polymerization is performed by such a method wherein a plasma polymerization apparatus, in which the polymer support was set, is evacuated and monomer vapor of ethynyltimethylsilane is subsequently supplied to said apparatus along with carrier gas under vacuum of 5 torr of less and power of 10-100W is applied to generate glow discharge. The thickness of the membrane is adjusted to 0.01-1mum or less. |
