| 摘要 |
A displacement detector utilizing changes of capacitance detecting the moving amount of the moving element by means of electric detection of changes in capacitance between the electrodes moving relatively. To the base of the detector is fixed a stator plate on which a plurality of transmitting electrodes are arranged at equal distances and a receiving electrode is zonally arranged in parallel with the transmitting electrodes. On the other hand, on the moving plate facing to the stator plate and slidingly established on the base, connecting electrodes are facingly installed in the spanning state over to both of the transmitting electrodes and the receiving electrode on the stator plate, and the transmitting electrodes and the receiving electrode are of electrostatic combination. The alternating current voltage having respectively different phases is applied to each of the transmitting electrodes and the phase of the output signal from the receiving electrode changes in accordance with the displacement of the moving plate. Useage of the phase changes enables the accurate detection of the displacement amount regardless of fluctuation of power voltage. The stator plate is installed the noise protective electrodes and the noise mixture into the receiving electrode from the voltage input portion can be firmly prevented.
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