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发明名称
摘要
申请公布号
JPH0412639(U)
申请公布日期
1992.01.31
申请号
JP19900053159U
申请日期
1990.05.22
申请人
发明人
分类号
H01L21/52;B05C5/00;(IPC1-7):H01L21/52
主分类号
H01L21/52
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代理人
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