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发明名称
ENTWICKELVORRICHTUNG FUER PHOTOLACKE.
摘要
申请公布号
DE3686242(D1)
申请公布日期
1992.09.03
申请号
DE19863686242
申请日期
1986.11.28
申请人
DAIKIN INDUSTRIES, LTD., OSAKA, JP
发明人
TAKEI, TOSHITAKA, SUITA-SHI OSAKA-FU, JP;FUNATSU, TSUNEMASA, SAKAI-SHI OSAKA-FU, JP
分类号
G03F7/30;(IPC1-7):G03F7/26
主分类号
G03F7/30
代理机构
代理人
主权项
地址
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