VERTICAL BOAT

摘要

PURPOSE: To provide a vertical boat which facilitates the substantial reduction of the slips of semiconductor wafers. CONSTITUTION: A vertical boat has at least 3 support members 1 and 2 which are stood in parallel with each other and at required intervals and are mainly made of Si-SiC or Si-SiC+CVD-SiC. A number of wafer supporting parts 7 and 8 which support semiconductor wafers 6 are protruded from the respective support members at required intervals. Semispherical silicon single crystals 9 are bonded onto the respective wafer supporting parts so as to protrude upward. With this constitution, the semiconductor wafer is supported by the wafer supporting parts with the silicon signal crystals which have the high purity as the semiconductor wafer therebetween and is not brought into direct contact with Si-SiC or Si-SiC+CVD-SiC material of which the wafer support parts are made, so that the semiconductor wafers are hardly contaminated.