| 摘要 |
PROBLEM TO BE SOLVED: To obtain an evaluation apparatus by which the shape inspection of a lens to be inspected and the homogeneity inspection in the interior of the lens are evaluated precisely by a method wherein, even when a noise is produced on interference fringes, the influence of the noise is removed easily. SOLUTION: In an apparatus, a lens 7 to be inspected is irradiated with a laser beam via a reference face member 6, interference fringes which are generated by light, to be inspected, from the lens 7 to be inspected and by reference light from the reference face member 6 are read out by a TV camera 10 installed in a light-receiving optical path (b), the read-out interference fringes are image-processed by an image processor 11, and the lens 7 to be inspected is evaluated on the basis of its processed result. In this case, e.g. an ND filter 13 as an optical member for quantity-of-light attenuation is installed in the middle of the light-receiving optical path (b). Alternatively, when the interference fringes are image-processed by the image processor 11, a part which acts as a noise in the interference fringes is masked, and the lens is evaluated in parts other than the masked part. |
