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发明名称
RINSE LIQUID NOZZLE IN RESIST APPLICATION DEVICE
摘要
申请公布号
JPH10163086(A)
申请公布日期
1998.06.19
申请号
JP19960316033
申请日期
1996.11.27
申请人
SONY CORP
发明人
SUENAGA RYUZO
分类号
B05D1/40;C23F1/08;H01L21/027;(IPC1-7):H01L21/027
主分类号
B05D1/40
代理机构
代理人
主权项
地址
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