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发明名称
DEVICE AND METHOD FOR MEASURING INTERFERENCE
摘要
申请公布号
JPH11201715(A)
申请公布日期
1999.07.30
申请号
JP19980003943
申请日期
1998.01.12
申请人
NIKON CORP
发明人
ICHIKAWA HAJIME
分类号
G01B9/02;(IPC1-7):G01B9/02
主分类号
G01B9/02
代理机构
代理人
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地址
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