METHOD, APPARATUS AND SYSTEM FOR VERIFICATION OF PATTERNS

摘要

A method, apparatus and system for verifying the establishment of a pattern includes means for storing a template of the pattern, means for acquiring an image of the established pattern, a first image processing means to alter at least one of said template and acquired images to produce at least two resultant images, comparison means to compare the two resultant images with the other of said template and acquired image and means to evaluate the results of each comparison to determine if the established pattern includes a defect. Both gray scale and binary processing and comparisons are disclosed for use as required.