发明名称 Semiconductor device and method of forming semiconductor device
摘要 A semiconductor device, such as an IC package, having the same size as an IC chip and having improved qualities is manufactured at a low cost by a particular manufacturing method. The semiconductor device has stepped-projection bumps bonded to electrode pads on a semiconductor substrate in which a semiconductor element is formed. A column portion and a portion in a horizontal portion of each stepped-projection bump are exposed while the other portion of the bump is covered with a protective material. When windows of the protective material corresponding to the column portions are formed, the windows are patterned by using a masking material based on a photoetching method, and the protective material is removed by etching.
申请公布号 US6475897(B1) 申请公布日期 2002.11.05
申请号 US20000639709 申请日期 2000.08.14
申请人 SEIKO INSTRUMENTS INC. 发明人 HOSAKA TAKASHI
分类号 H01L21/60;H01L23/485;H01L29/30;(IPC1-7):H01L29/30 主分类号 H01L21/60
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