| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for measuring eccentricity with high precision and low tact in eccentricity measurement of a set lens. SOLUTION: In the conventional manner, when there is an error in positioning of a first condenser lens, a measurement error occurs and when the set lens having a plurality of lenses is measured, it is necessary to transfer the first condensing lens. In addition, there is a problem that a positioning error is easily generated, a measurement error becomes larger since transfer distance becomes longer when the number of lenses increases and furthermore, it takes much time for measurement when the transfer distance become longer. The high precision and low tact lens eccentricity measurement is performed by observing different inspected surfaces of inspected lenses by first and second measurement systems and calculating an amount of eccentricity from the respective observation results. COPYRIGHT: (C)2006,JPO&NCIPI
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