发明名称 DIFFERENTIAL PRESSURE TYPE FLOWMETER, FLOW RATE CONTROL DEVICE, AND SUBSTRATE TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To precisely and stably measure with a differential pressure type flowmeter. SOLUTION: The differential pressure type flowmeter 1 comprises: a pressure loss tube 13 of a circular tube: a 1st pressure gauge 11 for measuring liquid flowing into the pressure loss tube 13: a 2nd pressure gauge 12 for measuring the pressure of the liquid flowing out of the pressure loss tube 13; a memory part 15 for storing information; and an operation part 16 for executing various operations, wherein in the pressure loss tube 13 of the differential pressure type flowmeter, a laminar flow of <2000 Reynolds number is formed. The outputs from the 1st pressure gauge 11 and the 2nd pressure gauge are transferred to the operation part 16, then the differential pressure at both the ends of the pressure loss tube 13 is obtained. The differential pressure type flowmeter 1 can measure the flow with high precision stably by making the flow in the pressure loss tube 13 surely laminar flow, then obtaining the differential pressure. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006153677(A) 申请公布日期 2006.06.15
申请号 JP20040345162 申请日期 2004.11.30
申请人 DAINIPPON SCREEN MFG CO LTD 发明人 MIZOHATA YASUHIRO
分类号 G01F1/48;G05D7/06;H01L21/306 主分类号 G01F1/48
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