Processing probe, processing apparatus, and method of manufacturing the processing probe

摘要

A method of manufacturing a processing probe comprising a cantilever arranged in opposition to a sample, and a processing needle provided at a tip end of the cantilever to be able to contact with a surface of the sample in a state of being opposed to the sample, the processing needle being sharpened at a tip end thereof, the method comprising a selecting process of selecting a diamond small piece, which is sized to be conformed to a tip end dimension of the cantilever and has a projection, out of a plurality of diamond small pieces, a moving process of moving the selected diamond small piece onto a processing base after the selecting process, and a processing process of performing an etching processing in a manner to further sharpen the projection in an optional shape with focused beam after the moving process and mounting a base end side of the projection to the tip end of the cantilever with the use of the focused beam to fabricate a processing needle.