| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an instrument for measuring a surface shape of a sample, capable of lowering a needle pressure of a probe to avoid deformation of the measured sample, and capable of solving the problem of deformation, moreover, even if the scanning speed of the probe is set high, and allowing accurate measurement in a short time. SOLUTION: This method of measuring the surface shape of the sample, by bringing the probe into contact with the surface face of the measured sample, is constituted to detect a skip of the probe by monitoring at least one of a speed and an acceleration of the probe at real time, based on the vertical displacement of the probe on a measured surface, and to measure the surface shape, by increasing the force for restraining the skip of the probe, when skipping is detected. This instrument for measuring the surface shape of the sample has a control means of detecting the skipping of the probe, based on the output signal from a detecting means for detecting the vertical displacement of the probe, and for controlling a needle pressure applying means corresponding to the detection of the skip in the probe to gradually decrease the needle pressure of the probe. COPYRIGHT: (C)2006,JPO&NCIPI |
