| 摘要 |
PROBLEM TO BE SOLVED: To achieve reduction and removal of an adhered deposit generated on an electrode with an inexpensive simple configuration.SOLUTION: The ion source includes an electrode for ion beam extraction cooled with cooling water. The flow rate of the cooling water is reduced from a predetermined flow rate in accordance with a kind of ionization gas or a beam current value during ion source operation.SELECTED DRAWING: Figure 1 |
